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典型文献
Integration of high-performance spin-orbit torque MRAM devices by 200-mm-wafer manufacturing platform
文献摘要:
We demonstrate in-plane field-free-switching spin-orbit torque(SOT)magnetic tunnel junction(MTJ)devices that are capable of low switching current density,fast speed,high reliability,and,most importantly,manufactured uniformly by the 200-mm-wafer platform.The performance of the devices is systematically studied,including their magnetic properties,switch-ing behaviors,endurance and data retention.The successful integration of SOT devices within the 200-mm-wafer manufactur-ing platform provides a feasible way to industrialize SOT MRAMs.It is expected to obtain excellent performance of the devices by further optimizing the MTJ film stacks and the corresponding fabrication processes in the future.
文献关键词:
作者姓名:
Hongchao Zhang;Xiangyue Ma;Chuanpeng Jiang;Jialiang Yin;Shuqin Lyu;Shiyang Lu;Xiantao Shang;Bowen Man;Cong Zhang;Dandan Li;Shuhui Li;Wenjing Chen;Hongxi Liu;Gefei Wang;Kaihua Cao;Zhaohao Wang;Weisheng Zhao
作者机构:
Fert Beijing Institute,School of Integrated Science and Engineering,Beihang University,Beijing 100191,China;Truth Memory Tech.Corporation,Beijing 100088,China;Beihang-Goertek Joint Microelectronics Institute,Qingdao Research Institute,Beihang University,Qingdao 266000,China
引用格式:
[1]Hongchao Zhang;Xiangyue Ma;Chuanpeng Jiang;Jialiang Yin;Shuqin Lyu;Shiyang Lu;Xiantao Shang;Bowen Man;Cong Zhang;Dandan Li;Shuhui Li;Wenjing Chen;Hongxi Liu;Gefei Wang;Kaihua Cao;Zhaohao Wang;Weisheng Zhao-.Integration of high-performance spin-orbit torque MRAM devices by 200-mm-wafer manufacturing platform)[J].半导体学报(英文版),2022(10):63-71
A类:
industrialize,MRAMs
B类:
Integration,high,performance,spin,orbit,torque,devices,by,wafer,manufacturing,platform,We,demonstrate,plane,field,free,switching,SOT,magnetic,tunnel,junction,MTJ,that,are,capable,low,current,density,fast,speed,reliability,most,importantly,manufactured,uniformly,is,systematically,studied,including,their,properties,behaviors,endurance,data,retention,successful,integration,within,provides,feasible,way,It,expected,obtain,excellent,further,optimizing,film,stacks,corresponding,fabrication,processes,future
AB值:
0.584242
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