典型文献
A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors
文献摘要：
The normal fabrication process for electronic and opto-electronic devices can bring in significant modifications on two-dimensional (2D) semiconductors' intrinsic properties.To address this issue,some dry methods have been developed,such as "transfer contact" method and "shadow mask technology".However,the method that can combine the advantages of low cost,non-destruction,and high reliability at sub-micrometer scale is rarely reported.Here,we demonstrate a fabrication technique using ultrafine quartz fibers as shadow masks.
文献关键词：
中图分类号：
作者姓名：
Li-An Li;Fang-Yuan Zhao;Shen-Qiang Zhai;Feng-Qi Liu;Zhong-Ming Wei
作者机构：
Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
文献出处：
引用格式：
[1]Li-An Li;Fang-Yuan Zhao;Shen-Qiang Zhai;Feng-Qi Liu;Zhong-Ming Wei-.A facile and non-destructive quartz fiber shadow mask process for the sub-micrometer device fabrication on two-dimensional semiconductors)[J].稀有金属（英文版）,2022(01):319-324
A类：
B类：
facile,destructive,quartz,shadow,process,sub,micrometer,fabrication,two,dimensional,semiconductors,normal,electronic,opto,devices,bring,significant,modifications,2D,intrinsic,properties,To,address,this,issue,some,dry,methods,have,been,developed,such,transfer,contact,technology,However,that,combine,advantages,low,cost,destruction,high,reliability,scale,rarely,reported,Here,demonstrate,technique,using,ultrafine,fibers,masks
AB值：
0.619868
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