典型文献
Soliton frequency comb generation in CMOS-compatible silicon nitride microresonators
文献摘要：
The monolithic integration of soliton microcomb devices with active photonic components and high-frequency electronics is highly desirable for practical applications.Among many materials,silicon nitride(SiNx)waveguide layers prepared by low-pressure chemical vapor deposition(LPCVD)have been the main platform for on-chip optical frequency comb generation.However,the high temperatures involved in LPCVD render it incompatible as a back-end process with complementary metal oxide semiconductor(CMOS)or active Ⅲ-Ⅴ compound semi-conductor fabrication flows.We report the generation of coherent soliton frequency combs in micro-ring resonators fabricated in deuterated silicon nitride(SiNx∶D)waveguides with a loss of 0.09 dB/cm.Deposited at 270℃by an inductance-coupled plasma chemical vapor deposition(ICP-CVD)process,the material preparation and fabrication flow are fully CMOS-compatible.These results enable the integration of silicon-nitride-based optical combs and photonic integrated circuits(PICs)on prefabricated CMOS and/or Ⅲ-Ⅴ substrates,therefore marking a major step forward in SiNx photonic technologies.
文献关键词：
中图分类号：
作者姓名：
YAOZU XIE;JIAQI LI;YANFENG ZHANG;ZERU WU;SHIHAO ZENG;SHUQING LIN;ZHAOYANG WU;WENCHAO ZHOU;YUJIE CHEN;SIYUAN YU
作者机构：
State Key Laboratory of Optoelectronic Materials and Technologies,School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510275,China
文献出处：
引用格式：
[1]YAOZU XIE;JIAQI LI;YANFENG ZHANG;ZERU WU;SHIHAO ZENG;SHUQING LIN;ZHAOYANG WU;WENCHAO ZHOU;YUJIE CHEN;SIYUAN YU-.Soliton frequency comb generation in CMOS-compatible silicon nitride microresonators)[J].光子学研究（英文）,2022(05):1290-1296
A类：
PICs
B类：
Soliton,frequency,generation,CMOS,silicon,nitride,microresonators,monolithic,integration,soliton,microcomb,devices,active,photonic,components,electronics,is,highly,desirable,practical,applications,Among,many,materials,SiNx,layers,prepared,by,pressure,chemical,vapor,deposition,LPCVD,have,been,main,platform,chip,optical,However,temperatures,involved,render,incompatible,back,process,complementary,metal,oxide,semiconductor,compound,fabrication,flows,We,report,coherent,combs,ring,deuterated,waveguides,loss,dB,Deposited,inductance,coupled,plasma,ICP,preparation,fully,These,results,enable,integrated,circuits,prefabricated,substrates,therefore,marking,major,step,forward,technologies
AB值：
0.555091
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