典型文献
Fabrication of the high-Q Si3N4 microresonators for soliton microcombs
文献摘要：
The microresonator-based soliton microcomb has shown a promising future in many applications.In this work,we report the fabrication of high quality[Q]Si3N4 microring resonators for soliton microcomb generation.By developing the fabri-cation process with crack isolation trenches and annealing,we can deposit thick stoichiometric Si3N4 film of 800 nm with-out cracks in the central area.The highest intrinsic Q of the Si3N4 microring obtained in our experiments is about 6 × 106,corresponding to a propagation loss as low as 0.058 dBm/cm.With such a high Q film,we fabricate microrings with the anomalous dispersion and demonstrate the generation of soliton microcombs with 100 mW on-chip pump power,with an optical parametric oscillation threshold of only 13.4 mW.Our Si3N4 integrated chip provides an ideal platform for researches and applications of nonlinear photonics and integrated photonics.
文献关键词：
中图分类号：
作者姓名：
Shuai Wan;Rui Niu;Jin-Lan Peng;Jin Li;Guang-Can Guo;Chang-Ling Zou;Chun-Hua Dong
作者机构：
CAS Key Laboratory of Quantum Information,University of Science and Technology of China,Hefei 230026,China;CAS Center For Excellence in Quantum Information and Quantum Physics,University of Science and Technology of China,Hefei 230026,China;Center for Micro and Nanoscale Research and Fabrication,University of Science and Technology of China,Chinese Academy of Sciences,Hefei 230026,China
文献出处：
引用格式：
[1]Shuai Wan;Rui Niu;Jin-Lan Peng;Jin Li;Guang-Can Guo;Chang-Ling Zou;Chun-Hua Dong-.Fabrication of the high-Q Si3N4 microresonators for soliton microcombs)[J].中国光学快报（英文版）,2022(03):111-116
A类：
microrings
B类：
Fabrication,Si3N4,microresonators,soliton,microcombs,has,shown,promising,future,many,applications,In,this,work,report,fabrication,quality,generation,By,developing,process,isolation,trenches,annealing,can,deposit,thick,stoichiometric,film,cracks,central,area,highest,intrinsic,obtained,our,experiments,about,corresponding,propagation,loss,low,dBm,With,such,fabricate,anomalous,dispersion,demonstrate,mW,chip,pump,power,optical,parametric,oscillation,threshold,only,Our,integrated,provides,ideal,platform,researches,nonlinear,photonics
AB值：
0.527147
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