典型文献
Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror
文献摘要：
In the process of manufacturing the world's largest silicon carbide(SiC)aspheric mirror,the primary difficulties are mirror blank preparation,asphere fabrication,and testing,as well as cladding and coating.Specifically,the challenges include the homogeneity of the complicated structure casting,accuracy and efficiency of the fabrication process,print-through effect,fidelity and precision of test procedure,stress and denseness of cladding process,the dynamic range of interferometric measurement,and air turbulence error due to the long optical path.To break through such a barrier of difficulties,we proposed the water-soluble room temperature vanishing mold and gel casting technology,homogeneous microstructure reaction-formed joint technology,nano-accuracy efficient compound fabrication,gravity unloading technology,high-denseness low-defect physical vapor deposition(PVD)Si-cladding technology,test data fusion method,and time-domain averaging method,etc.Based on the proposed technologies and methods,we have accomplished the world's largest SiC aspheric mirror with a size of ?4.03 m.The impressive performance of the SiC aspheric mirror is validated by the characteristics of the fabricated SiC aspheric mirror.The aerial density of the SiC blank is less than 120 kg/m2,surface shape test accuracy is better than 6 nm RMS,thickness inhomogeneity of the cladding layer is less than 5％,and the final surface figure error and roughness are 15.2 nm RMS and 0.8 nm RMS,respectively.
文献关键词：
中图分类号：
作者姓名：
Xuejun Zhang;Haixiang Hu;Xiaokun Wang;Xiao Luo;Ge Zhang;Wenxing Zhao;Xiaoyi Wang;Zhenyu Liu;Ling Xiong;Erhui Qi;Congcong Cui;Yanchao Wang;Yingjie Li;Xu Wang;Longxiang Li;Yang Bai;Qiang Cheng;Zhiyu Zhang;Ruigang Li;Wa Tang;Xuefeng Zeng;Weijie Deng;Feng Zhang
作者机构：
Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,130033 Changchun,Jilin,China;University of Chinese Academy of Sciences,100049 Beijing,China
文献出处：
引用格式：
[1]Xuejun Zhang;Haixiang Hu;Xiaokun Wang;Xiao Luo;Ge Zhang;Wenxing Zhao;Xiaoyi Wang;Zhenyu Liu;Ling Xiong;Erhui Qi;Congcong Cui;Yanchao Wang;Yingjie Li;Xu Wang;Longxiang Li;Yang Bai;Qiang Cheng;Zhiyu Zhang;Ruigang Li;Wa Tang;Xuefeng Zeng;Weijie Deng;Feng Zhang-.Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror)[J].光：科学与应用（英文版）,2022(12):2873-2885
A类：
asphere,denseness
B类：
Challenges,strategies,high,accuracy,manufacturing,world,largest,SiC,aspheric,mirror,In,process,silicon,carbide,primary,difficulties,are,blank,preparation,fabrication,testing,well,cladding,coating,Specifically,challenges,include,complicated,casting,efficiency,print,through,effect,fidelity,precision,procedure,stress,dynamic,range,interferometric,measurement,air,turbulence,error,due,long,optical,path,To,break,such,barrier,proposed,water,soluble,room,temperature,vanishing,mold,gel,technology,homogeneous,microstructure,reaction,formed,joint,nano,efficient,compound,gravity,unloading,low,defect,physical,vapor,deposition,PVD,data,fusion,domain,averaging,etc,Based,technologies,methods,have,accomplished,size,impressive,performance,validated,by,characteristics,fabricated,aerial,density,less,than,surface,shape,better,RMS,thickness,inhomogeneity,layer,final,figure,roughness,respectively
AB值：
0.543573
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