典型文献
Development of RuS2 for near-infrared photodetector by atomic layer deposition and post-sulfurization
文献摘要：
The chalcogenides of platinum-group metals(PGMs)have been known to be present in minerals and the intermediate products of refining.Over recent years,their applications in various fields,including catalysis,have been explored.Given that certain PGM chalcogenides behave as compound semiconductors,they can be used as materials for photodetectors.In this study,RuS2,featuring a bandgap suitable for near-infrared photodetectors,was prepared by forming Ru on a SiO2/Si substrate via the atomic layer deposition method using[Ru(TMM)(CO)3]as the precursor.Annealing was conducted at 800℃ for 1 h under H2S flow.High-resolution transmission electron microscopy(HRTEM)and X-ray diffraction(XRD)anal-ysis clearly confirmed that the as-deposited hexagonal close-packed(hcp)Ru transformed to cubic RuS2 after post-annealing.The surface morphologies,chemical states,and electrical and optical properties of RuS2 were inves-tigated.The influence of the metallic Ru surface mor-phology prior to sulfurization on the reaction between Ru and H2S was also discussed.To evaluate the potential of using RuS2 as a photodetector,a photodetector was fabri-cated by forming electrodes on RuS2 to measure its pho-tocurrent under near-infrared light.Thus,RuS2 was proven to exhibit a short response time(59 μs)and generate a photocurrent of 84 nA under near-infrared light at 940 nm.
文献关键词：
中图分类号：
作者姓名：
Tatsuya Nakazawa;Donghyun Kim;Jaehyeok Kim;Yohei Kotsugi;Taehoon Cheon;Seung-Min Chung;Soo-Hyun Kim;Hyungjun Kim
作者机构：
School of Electrical and Electronic Engineering,Yonsei University,Seoul 03722,Korea;Isehara Technical Center,Metallic Materials Development Department,TANAKA Kikinzoku Kogyo K.K,Isehara,Kanagawa 259-1146,Japan;Institute of Materials Technology,Yeungnam University,Gyeongsan-si 38541,Gyeongbuk,Korea;Chemical Materials Development Department,TANAKA Kikinzoku Kogyo K.K,Tsukuba Technical Center,Ibaraki 300-4247,Japan;School of Materials Science and Engineering,Yeungnam University,Gyeongsan-si 38541,Gyeongbuk,Korea;Center for Core Research Facilities,Daegu Gyeongbuk Institute of Science&Technology,Daegu 711-873,Korea
文献出处：
引用格式：
[1]Tatsuya Nakazawa;Donghyun Kim;Jaehyeok Kim;Yohei Kotsugi;Taehoon Cheon;Seung-Min Chung;Soo-Hyun Kim;Hyungjun Kim-.Development of RuS2 for near-infrared photodetector by atomic layer deposition and post-sulfurization)[J].稀有金属（英文版）,2022(09):3086-3099
A类：
RuS2,tocurrent
B类：
Development,near,infrared,by,atomic,layer,deposition,post,sulfurization,chalcogenides,platinum,group,metals,PGMs,been,known,present,minerals,intermediate,products,refining,Over,recent,years,their,applications,various,fields,including,catalysis,explored,Given,that,certain,behave,compound,semiconductors,they,can,used,materials,photodetectors,In,this,study,featuring,bandgap,suitable,was,prepared,forming,SiO2,substrate,via,method,using,TMM,precursor,Annealing,conducted,under,H2S,flow,High,resolution,transmission,electron,microscopy,HRTEM,ray,diffraction,anal,clearly,confirmed,deposited,hexagonal,close,packed,hcp,transformed,cubic,after,annealing,surface,morphologies,chemical,states,electrical,optical,properties,were,inves,tigated,influence,metallic,phology,prior,reaction,between,also,discussed,To,evaluate,potential,fabri,cated,electrodes,measure,its,light,Thus,proven,exhibit,short,response,generate,photocurrent,nA
AB值：
0.582788
相似文献
机标中图分类号，由域田数据科技根据网络公开资料自动分析生成，仅供学习研究参考。
