典型文献
Photoelectric properties of β-Ga2O3 thin films annealed at different conditions
文献摘要：
In this work,metal-semiconductor-metal solar-blind ultraviolet photoconductors were fabricated based on the β-Ga2O3 thin films which were grown on the c-plane sapphire substrates by molecular beam epitaxy.Then,the effects of β-Ga2O3 annealing on both its material character-istics and the device photoconductivity were studied.The β-Ga2O3 thin films were annealed at 800,900,1000,and 1100℃,respectively.Moreover,the annealing time was fixed at 2 h,and the annealing ambients were oxygen,nitro-gen,and vacuum(4.9×10-4 Pa),respectively.The crys-talline quality and texture of the β-Ga2O3 thin films before and after annealing were investigated by X-ray diffraction(XRD),showing that higher annealing temperature can result in a weaker intensity of(402)diffraction peak and a lower device photoresponsivity.Furthermore,the vacuum-annealed sam-ple exhibits the highest photoresponsivity compared with the oxygen-and nitrogen-annealed samples at the same annealing temperature.In addition,the persistent photoconductivity effect is effectively restrained in the oxygen-annealed sample even with the lowest photoresponsivity.
文献关键词：
中图分类号：
作者姓名：
Tuo Sheng;Xing-Zhao Liu;Ling-Xuan Qian;Bo Xu;Yi-Yu Zhang
作者机构：
School of Microelectronics and Solid-State Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China;State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China
文献出处：
引用格式：
[1]Tuo Sheng;Xing-Zhao Liu;Ling-Xuan Qian;Bo Xu;Yi-Yu Zhang-.Photoelectric properties of β-Ga2O3 thin films annealed at different conditions)[J].稀有金属（英文版）,2022(04):1375-1379
A类：
photoconductors,ambients
B类：
Photoelectric,properties,Ga2O3,thin,films,annealed,different,conditions,In,this,work,metal,semiconductor,solar,blind,ultraviolet,were,fabricated,which,grown,plane,sapphire,substrates,by,molecular,beam,epitaxy,Then,effects,annealing,both,material,character,istics,device,photoconductivity,studied,respectively,Moreover,was,fixed,oxygen,vacuum,Pa,crys,talline,quality,texture,before,after,investigated,ray,diffraction,showing,that,higher,temperature,can,result,weaker,intensity,peak,lower,photoresponsivity,Furthermore,exhibits,highest,compared,nitrogen,samples,same,addition,persistent,effectively,restrained,even,lowest
AB值：
0.509652
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