典型文献
Mn3Ag(1-x)Cu(x)N antiperovskite thin films with ultra-low temperature coefficient of resistance
文献摘要：
We demonstrate the first successful attempt to partially substitute Cu into the Mn3AgN-antiperovskite system to form Mn3Ag(1-x)Cu(x)N thin films with an ultra-low temperature coefficient of resistance(TCR)for fabrication of ultra-precise passive components.Films were grown by reactive magnetron sputtering on alumina and glass substrates and were found to be amorphous in nature with highly negative TCR of-233 to-351 ppm/℃in their as-grown state.Increasing Cu alloying from x=0 to 1,resulted in increased sheet resistance,a negative shift of TCR and a change of grain morphology from spherical to elongated.Post-deposition heat treatment at 300-375℃,resulted in a positive shift of TCR and an ultra-low TCR of-4.66 ppm/℃for films with x=0.6.The heat treatment induces grain growth,surface roughness and the formation of a manganese oxide upper surface layer up until temperatures of 350℃,after which surface oxidation begins to dominate.The growth rate of the surface layer is controlled by the Cu concentration and heat treatment temperature,which both play a central role in the development of these novel ultra-low TCR Mn3Ag(1-x)Cu(x)N thin film structures.
文献关键词：
中图分类号：
作者姓名：
Cecil Cherian Lukose;Guillaume Zoppi;Martin Birkett
作者机构：
Faculty of Engineering and Environment,Northumbria University,Newcastle upon Tyne NE1 8ST,United Kingdom
文献出处：
引用格式：
[1]Cecil Cherian Lukose;Guillaume Zoppi;Martin Birkett-.Mn3Ag(1-x)Cu(x)N antiperovskite thin films with ultra-low temperature coefficient of resistance)[J].材料科学技术（英文版）,2022(04):138-147
A类：
Mn3Ag,antiperovskite,Mn3AgN
B类：
thin,films,ultra,low,coefficient,resistance,We,demonstrate,first,successful,attempt,partially,substitute,into,system,TCR,fabrication,precise,passive,components,Films,were,grown,by,reactive,magnetron,sputtering,alumina,glass,substrates,found,amorphous,nature,highly,negative,ppm,their,state,Increasing,alloying,from,resulted,increased,sheet,shift,change,grain,morphology,spherical,elongated,Post,deposition,heat,treatment,positive,induces,growth,surface,roughness,formation,manganese,oxide,upper,layer,until,temperatures,after,which,oxidation,begins,dominate,controlled,concentration,both,play,central,role,development,these,novel,structures
AB值：
0.499262
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