典型文献
RF characterization of InP double heterojunction bipolar transistors on a flexible substrate under bending conditions
文献摘要：
This letter presents the fabrication of InP double heterojunction bipolar transistors(DHBTs)on a 3-inch flexible sub-strate with various thickness values of the benzocyclobutene(BCB)adhesive bonding layer,the corresponding thermal resist-ance of the InP DHBT on flexible substrate is also measured and calculated.InP DHBT on a flexible substrate with 100 nm BCB obtains cut-off frequency fT=358 GHz and maximum oscillation frequency fMAX=530 GHz.Moreover,the frequency perform-ance of the InP DHBT on flexible substrates at different bending radii are compared.It is shown that the bending strain has little effect on the frequency characteristics(less than 8.5％),and these bending tests prove that InP DHBT has feasible flexibil-ity.
文献关键词：
中图分类号：
作者姓名：
Lishu Wu;Jiayun Dai;Yuechan Kong;Tangsheng Chen;Tong Zhang
作者机构：
Joint International Research Laboratory of Information Display and Visualization,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China;Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute,Nanjing 210016,China;Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,Ministry of Education,School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China
文献出处：
引用格式：
[1]Lishu Wu;Jiayun Dai;Yuechan Kong;Tangsheng Chen;Tong Zhang-.RF characterization of InP double heterojunction bipolar transistors on a flexible substrate under bending conditions)[J].半导体学报（英文版）,2022(09):63-66
A类：
DHBTs,benzocyclobutene,fMAX
B类：
RF,characterization,InP,double,heterojunction,bipolar,transistors,flexible,under,bending,conditions,This,letter,presents,fabrication,inch,various,thickness,values,BCB,adhesive,bonding,layer,corresponding,thermal,resist,ance,also,measured,calculated,obtains,cut,off,frequency,fT,GHz,maximum,oscillation,Moreover,perform,substrates,different,radii,compared,It,shown,that,strain,has,little,effect,characteristics,less,than,these,tests,prove,feasible,flexibil,ity
AB值：
0.504099
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