Convergence of high-performance silicon photonics and electronics,monolithically integrated in state-of-the-art CMOS platforms,is the holy grail for enabling the ultimate efficiencies,performance,and scaling of electronic-photonic systems-on-chip.It requires the emergence of platforms that combine state-of-the-art RF transistors with optimized silicon photonics,and a generation of photonic device technology with ultralow energies,in-creased operating spectrum,and the elimination of power-hungry thermal tuning.In this paper,in a co-optimized monolithic electronics-photonics platform(GlobalFoundries 45CLO),we turn the metal-oxide-semiconductor(MOS)field-effect transistor's basic structure into a novel,highly efficient MOS capacitor ring modulator.It has the smallest ring cavity(1.5 μm radius),largest corresponding spur-free free spectral range(FSR=8.5 THz),and record 30 GHz/V shift efficiency in the O-band among silicon modulators demonstrated to date.With 1 Vpp RF drive,we show an open optical eye while electro-optically tuning the modulator to track over 400 pm(69 GHz)change in the laser wavelength(using 2.5 VDC range).A 90 GHz maximum electro-optic resonance shift is demonstrated with under 40 nW of power,providing a strong nonthermal tuning mechanism in a CMOS photonics platform.The modulator has a separately optimized body layer but shares the gate device layer and the gate oxide with 45 nm transistors,while meeting all CMOS manufacturability design rules.This type of convergent evolution of electronics and photonics may be the future of platforms for high-performance systems-on-chip.

Department of Electrical and Computer Engineering,Boston University,Boston,Massachusetts 02215,USA;Ayar Labs Inc.,Emeryville,California 94608,USA;Department of Electrical Engineering and Computer Sciences,University of California Berkeley,Berkeley,California 94709,USA

[1]HAYK GEVORGYAN;ANATOL KHILO;MARK T.WADE;VLADIMIR M.STOJANOVI?;MILO? A.POPOVI?-.Miniature,highly sensitive MOSCAP ring modulators in co-optimized electronic-photonic CMOS)[J].光子学研究（英文）,2022(01):前插1-前插7

MOSCAP,GlobalFoundries,45CLO

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