The emerging fields of silicon(Si)photonic micro-electromechanical systems(MEMS)and optomechanics enable a wide range of novel high-performance photonic devices with ultra-low power consumption,such as integrated optical MEMS phase shifters,tunable couplers,switches,and optomechanical resonators.In contrast to conven-tional SiO2-clad Si photonics,photonic MEMS and optomechanics have suspended and movable parts that need to be protected from environmental influence and contamination during operation.Wafer-level hermetic sealing can be a cost-efficient solution,but Si photonic MEMS that are hermetically sealed inside cavities with optical and electrical feedthroughs have not been demonstrated to date,to our knowledge.Here,we demonstrate wafer-level vacuum sealing of Si photonic MEMS inside cavities with ultra-thin caps featuring optical and electrical feed-throughs that connect the photonic MEMS on the inside to optical grating couplers and electrical bond pads on the outside.We used Si photonic MEMS devices built on foundry wafers from the iSiPP50G Si photonics plat-form of IMEC,Belgium.Vacuum confinement inside the sealed cavities was confirmed by an observed increase of the cutoff frequency of the electro-mechanical response of the encapsulated photonic MEMS phase shifters,due to reduction of air damping.The sealing caps are extremely thin,have a small footprint,and are compatible with subsequent flip-chip bonding onto interposers or printed circuit boards.Thus,our approach for sealing of in-tegrated Si photonic MEMS clears a significant hurdle for their application in high-performance Si photonic circuits.

GAEHUN JO;PIERRE EDINGER;SIMON J.BLEIKER;XIAOJING WANG;ALAIN YUJI TAKABAYASHI;HAMED SATTARI;NIELS QUACK;MOISES JEZZINI;JUN SU LEE;PETER VERHEYEN;IMAN ZAND;UMAR KHAN;WIM BOGAERTS;G?RAN STEMME;KRISTINN B.GYLFASON;FRANK NIKLAUS

Division of Micro and Nanosystems,KTH Royal Institute of Technology,11428 Stockholm,Sweden;école Polytechnique Fédérale de Lausanne(EPFL),1015 Lausanne,Switzerland;Tyndall National Institute,Lee Maltings Complex Dyke Parade,T12 R5CP Cork,Ireland;imec vzw.3DSIP Department,Si Photonics Group,Kapeldreef 75,3001 Leuven,Belgium;Department of Information Technology,Photonics Research Group,Ghent University-IMEC,9052 Gent,Belgium

光子学研究（英文）

[1]GAEHUN JO;PIERRE EDINGER;SIMON J.BLEIKER;XIAOJING WANG;ALAIN YUJI TAKABAYASHI;HAMED SATTARI;NIELS QUACK;MOISES JEZZINI;JUN SU LEE;PETER VERHEYEN;IMAN ZAND;UMAR KHAN;WIM BOGAERTS;G?RAN STEMME;KRISTINN B.GYLFASON;FRANK NIKLAUS-.Wafer-level hermetically sealed silicon photonic MEMS)[J].光子学研究（英文）,2022(02):前插1-前插8

hermetically,hermetic,feedthroughs,iSiPP50G,IMEC,interposers,clears

Wafer,level,sealed,silicon,MEMS,emerging,fields,micro,electromechanical,systems,optomechanics,enable,wide,range,novel,high,performance,devices,ultra,low,power,consumption,such,integrated,optical,phase,shifters,tunable,couplers,switches,optomechanical,resonators,In,contrast,conven,tional,SiO2,clad,photonics,have,suspended,movable,parts,that,need,protected,from,environmental,influence,contamination,during,operation,sealing,cost,efficient,solution,but,are,inside,cavities,electrical,not,been,demonstrated,date,our,knowledge,Here,vacuum,thin,featuring,connect,grating,pads,outside,We,used,built,foundry,wafers,plat,Belgium,Vacuum,confinement,was,confirmed,by,observed,increase,cutoff,frequency,response,encapsulated,due,reduction,air,damping,extremely,small,footprint,compatible,subsequent,flip,chip,bonding,onto,printed,boards,Thus,approach,significant,hurdle,their,application,circuits

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