典型文献
Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review
文献摘要：
Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple external elec-tromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynam-ic optical modulation.In this paper,we will briefly review the technologies and applications of Si-based MOEMS.Their basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,fol-lowed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromiirror arrays,micro-spectromet-ers,and optical/photonic switches.Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optic-al sensing.Finally,future research and development prospects of Si-based MOEMS are discussed.
文献关键词：
中图分类号：
作者姓名：
Shanshan Chen;Yongyue Zhang;Xiaorong Hong;Jiafang Li
作者机构：
Key Laboratory for Microstructural Material Physics of Hebei Province,School of Science,Yanshan University,Qinhuangdao 066004,China;Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement(Ministry of Education),Beijing Key Laboratory of Nanophotonics&Ultrafine Optoelectronic Systems,and School of Physics,Beijing Institute of Technology,Beijing 100081,China;Yangtze Delta Region Academy of Beijing Institute of Technology,Jiaxing 314019,China
文献出处：
引用格式：
[1]Shanshan Chen;Yongyue Zhang;Xiaorong Hong;Jiafang Li-.Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review)[J].半导体学报（英文版）,2022(08):25-33
A类：
tromechanical,micromirrors,micromiirror,spectromet
B类：
Technologies,applications,silicon,optical,electromechanical,systems,review,Micro,MOEMS,combine,merits,MEMS,optics,enable,unique,functions,wide,range,advanced,Using,simple,external,control,methods,such,electrostatic,magnetic,thermal,effects,Si,can,achieve,precise,dynam,modulation,In,this,paper,will,briefly,technologies,Their,basic,working,principles,advantages,general,materials,micromachining,fabrication,are,introduced,concisely,fol,lowed,by,research,progress,devices,including,arrays,ers,photonic,switches,Owing,spatial,light,high,speed,signal,processing,they,have,several,promising,communications,digital,sensing,Finally,future,development,prospects,discussed
AB值：
0.564233
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