典型文献
Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
文献摘要：
In this paper,we report on polarization combining two-dimensional grating couplers(2D GCs)on amorphous Si:H,fabri-cated in the backend of line of a photonic BiCMOS platform.The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter,which can be implemented on bulk Si wafers.The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of-5 dB with a wafer variation of±1.2 dB.Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated.
文献关键词：
中图分类号：
作者姓名：
Galina Georgieva;Christian Mai;Pascal M.Seiler;Anna Peczek;Lars Zimmermann
作者机构：
Hochfrequenztechnik-Photonik/Siliziumphotonik,Technische Universit?t Berlin,Stra?e des 17.Juni 135,10623 Berlin,Germany;IHP—Leibnitz Institut für innovative Mikroelektronik,Im Technologiepark 25,15236 Frankfurt(Oder),Germany;IHP Solutions GmbH,Im Technologiepark 7,15236 Frankfurt(Oder),Germany
文献出处：
引用格式：
[1]Galina Georgieva;Christian Mai;Pascal M.Seiler;Anna Peczek;Lars Zimmermann-.Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line)[J].光电子前沿（英文版）,2022(01):143-155
A类：
backend
B类：
Dual,polarization,multiplexing,amorphous,Si,grating,couplers,silicon,photonic,transmitters,BiCMOS,In,this,paper,we,report,combining,two,dimensional,2D,GCs,platform,can,be,used,as,interface,hybrid,coherent,which,implemented,bulk,wafers,fabricated,operate,telecom,band,show,experimental,coupling,efficiency,dB,variation,Possibilities,enhancement,improved,performance,stability,future,design,generations,are,outlined,extension,toward,devices,also,investigated
AB值：
0.564777
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