典型文献
Gas breakdown in radio-frequency field within MHz range:a review of the state of the art
文献摘要：
Low-temperature plasmas(LTPs)driven by 1-100 MHz radio-frequency(MRF)are essential for many industrial applications,and their breakdown characteristics are different to that of direct current(DC)breakdown.This review seeks to understand the state of the art of electric breakdown in the MRF field and provide references for related basic and applied research.We have given a brief history of research into MRF-driven breakdown,including Paschen curves,the corresponding discharge modes and parameter spaces,and the evolution of the parameters during the breakdown process.It is shown that the focus has been transferred from the breakdown voltage and V-I characteristics to the evolution of plasma parameters during the breakdown,both in experiments and simulations.It is shown that many fundamental and applied problems still need to be investigated,especially with the new global model and the incorporation of the external circuit model.
文献关键词：
中图分类号：
作者姓名：
Wei JIANG;Hao WU;Zhijiang WANG;Lin YI;Ya ZHANG
作者机构：
School of Physics,Huazhong University of Science and Technology,Wuhan 430074,People's Republic of China;International Joint Research Laboratory of Magnetic Confinement Fusion and Plasma Physics,State Key Laboratory of Advanced Electromagnetic Engineering and Technology,School of Electrical and Electronic Engineering,Huazhong University of Science and Technology,Wuhan 430074,People's Republic of China;School of Electronics and Information Engineering,Hubei University of Science and Technology,Xianning 437100,People's Republic of China;Department of Physics,Wuhan University of Technology,Wuhan 430070,People's Republic of China
文献出处：
引用格式：
[1]Wei JIANG;Hao WU;Zhijiang WANG;Lin YI;Ya ZHANG-.Gas breakdown in radio-frequency field within MHz range:a review of the state of the art)[J].等离子体科学和技术（英文版）,2022(12):179-190
A类：
LTPs
B类：
Gas,breakdown,radio,frequency,field,within,MHz,range,review,state,art,Low,temperature,plasmas,driven,by,MRF,are,essential,many,industrial,applications,their,characteristics,different,that,direct,current,DC,This,seeks,understand,electric,provide,references,related,basic,applied,research,We,have,given,brief,history,into,including,Paschen,curves,corresponding,discharge,modes,spaces,evolution,parameters,during,process,It,shown,focus,has,been,transferred,from,voltage,both,experiments,simulations,fundamental,problems,still,need,investigated,especially,new,global,model,incorporation,external,circuit
AB值：
0.575066
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