典型文献
Fundamental study towards a better understanding of low pressure radio-frequency plasmas for industrial applications
文献摘要：
Two classic radio-frequency(RF)plasmas,i.e.,the capacitively and the inductively coupled plasmas(CCP and ICP),are widely employed in material processing,e.g.,etching and thin film deposition,etc.Since RF plasmas are usually op-erated in particular circumstances,e.g.,low pressures(mTorr-Torr),high-frequency electric field(13.56 MHz-200 MHz),reactive feedstock gases,diverse reactor configurations,etc.,a variety of physical phenomena,e.g.,electron resonance heating,discharge mode transitions,striated structures,standing wave effects,etc.,arise.These physical effects could sig-nificantly influence plasma-based material processing.Therefore,understanding the fundamental processes of RF plasma is not only of fundamental interest,but also of practical significance for the improvement of the performance of the plasma sources.In this article,we review the major progresses that have been achieved in the fundamental study on the RF plasmas,and the topics include 1)electron heating mechanism,2)plasma operation mode,3)pulse modulated plasma,and 4)elec-tromagnetic effects.These topics cover the typical issues in RF plasma field,ranging from fundamental to application.
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作者姓名：
Yong-Xin Liu;Quan-Zhi Zhang;Kai Zhao;Yu-Ru Zhang;Fei Gao;Yuan-Hong Song;You-Nian Wang
作者机构：
Key Laboratory of Materials Modification by Laser,Ion,and Electron Beams(Ministry of Education),School of Physics,Dalian University of Technology,Dalian 116024,China
文献出处：
引用格式：
[1]Yong-Xin Liu;Quan-Zhi Zhang;Kai Zhao;Yu-Ru Zhang;Fei Gao;Yuan-Hong Song;You-Nian Wang-.Fundamental study towards a better understanding of low pressure radio-frequency plasmas for industrial applications)[J].中国物理B（英文版）,2022(08):16-38
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Fundamental,study,towards,better,understanding,low,radio,frequency,plasmas,industrial,applications,Two,classic,RF,capacitively,inductively,coupled,CCP,ICP,are,widely,employed,material,processing,etching,thin,film,deposition,Since,usually,erated,particular,circumstances,pressures,mTorr,high,electric,field,MHz,reactive,feedstock,gases,diverse,reactor,configurations,variety,physical,phenomena,electron,resonance,heating,discharge,mode,transitions,striated,structures,wave,effects,arise,These,could,nificantly,influence,Therefore,fundamental,processes,not,only,interest,but,also,practical,significance,improvement,performance,sources,In,this,article,we,review,major,progresses,that,have,been,achieved,topics,include,mechanism,operation,pulse,modulated,tromagnetic,cover,typical,issues,ranging,from
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0.624938
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