典型文献
Interfacial dynamics of GaP/Si(100)heterostructure grown by molecular beam epitaxy
文献摘要：
The atomic structure and surface chemistry of GaP/Si(100)heterostructure with different pre-layers grown by molecu-lar beam epitaxy are studied.It is found that GaP epilayer with Ga-riched pre-layers on Si(100)substrate has regular surface mor-phology and stoichiometric abrupt heterointerfaces from atomic force microscopes(AFMs)and spherical aberration-corrected transmission electron microscopes(ACTEMs).The interfacial dynamics of GaP/Si(100)heterostructure is investigated by X-ray photoelectron spectroscopy(XPS)equipped with an Ar gas cluster ion beam,indicating that Ga pre-layers can lower the inter-face formation energy and the bond that is formed is more stable.These results suggest that Ga-riched pre-layers are more con-ducive to the GaP nucleation as well as the epitaxial growth of GaP material on Si(100)substrate.
文献关键词：
中图分类号：
作者姓名：
Tieshi Wei;Xuefei Li;Zhiyun Li;Wenxian Yang;Yuanyuan Wu;Zhiwei Xing;Shulong Lu
作者机构：
Key Laboratory of Nanodevices and Applications,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China;Nano Science and Technology Institute,University of Science and Technology of China,Suzhou 215123,China;Vacuum Interconnected Nanotech Workstation(NANO-X),Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China
文献出处：
引用格式：
[1]Tieshi Wei;Xuefei Li;Zhiyun Li;Wenxian Yang;Yuanyuan Wu;Zhiwei Xing;Shulong Lu-.Interfacial dynamics of GaP/Si(100)heterostructure grown by molecular beam epitaxy)[J].半导体学报（英文版）,2022(12):33-39
A类：
AFMs,ACTEMs
B类：
Interfacial,dynamics,GaP,Si,heterostructure,grown,by,molecular,beam,epitaxy,atomic,surface,chemistry,different,pre,layers,are,studied,It,found,that,epilayer,riched,substrate,has,regular,phology,stoichiometric,abrupt,heterointerfaces,from,force,microscopes,spherical,aberration,corrected,transmission,interfacial,investigated,ray,photoelectron,spectroscopy,XPS,equipped,Ar,gas,cluster,indicating,can,lower,formation,energy,bond,formed,more,stable,These,results,suggest,con,ducive,nucleation,well,epitaxial,growth,material
AB值：
0.509224
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