典型文献
Simulation study on electron heating characteristics in magnetic enhancement capacitively coupled plasmas with a longitudinal magnetic field
文献摘要：
The electron heating characteristics of magnetic enhancement capacitively coupled argon plasmas in presence of both longitudinal and transverse uniform magnetic field have been explored through both theoretical and numerical calculations.It is found that the longitudinal magnetic field can affect the heating by changing the level of the pressure heating along the longitudinal direction and that of the Ohmic heating along the direction which is perpendicular to both driving electric field and the applied transverse magnetic field,and a continuously increased longitudinal magnetic field can induce pressure heating to become dominant.Moreover,the electron temperature as well as proportion of some low energy electrons will increase if a small longitudinal magnetic field is introduced,which is attributed to the increased average electron energy.We believe that the research will provide guidance for optimizing the magnetic field configuration of some discharge systems having both transverse and longitudinal magnetic field.
文献关键词：
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作者姓名：
Haiyun TAN;Tianyuan HUANG;Peiyu JI;Lanjian ZHUGE;Xuemei WU
作者机构：
School of Physical Science and Technology&Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,Suzhou 215006,People's Republic of China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province&Key Lab of Modern Optical Technologies of Education Ministry of China,Soochow University,Suzhou 215006,People's Republic of China;School of Optoelectronic Science and Engineering,Soochow University,Suzhou 215006,People's Republic of China;Analysis and Testing Center,Soochow University,Suzhou 215123,People's Republic of China
文献出处：
引用格式：
[1]Haiyun TAN;Tianyuan HUANG;Peiyu JI;Lanjian ZHUGE;Xuemei WU-.Simulation study on electron heating characteristics in magnetic enhancement capacitively coupled plasmas with a longitudinal magnetic field)[J].等离子体科学和技术（英文版）,2022(10):67-73
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0.48487
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