典型文献
Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing
文献摘要：
Gas sensors have a wide variety of applications.Among various existing gas sensing technologies,optical gas sensors have outstanding advantages.The development of the Internet of Things and consumer electronics has put stringent requirements on miniaturized gas sensing technology.Here,we demonstrate a chip-scale silicon substrate-integrated hollow waveguide(Si-iHWG)to serve as an optical channel and gas cell in an optical gas sensor.It is fabricated through silicon wafer etching and wafer bonding.The Si-iHWG chip is further assembled with an off-chip light source and detector to build a fully functional compact nondispersive infrared(NDIR)C02 sensor.The chip size is 10 mm×9 mm,and the dimension of the sensor excluding the microcontroller board is 50 mm×25 mm×16 mm.This chip solution with compactness,versatility,robustness,and low cost provides a cost-effective platform for miniaturized optical sensing applications ranging from air quality monitoring to con-sumer electronics.
文献关键词：
中图分类号：
作者姓名：
SHAONAN ZHENG;HONG CAI;LINFANG XU;NANXI LI;ZHONGHUA GU;YAO ZHANG;WEIGUO CHEN;YANYAN ZHOU;QINGXIN ZHANG;LENNON YAO TING LEE
作者机构：
Institute of Microelectronics,A*STAR(Agency for Science,Technology and Research),Singapore 138634,Singapore
文献出处：
引用格式：
[1]SHAONAN ZHENG;HONG CAI;LINFANG XU;NANXI LI;ZHONGHUA GU;YAO ZHANG;WEIGUO CHEN;YANYAN ZHOU;QINGXIN ZHANG;LENNON YAO TING LEE-.Silicon substrate-integrated hollow waveguide for miniaturized optical gas sensing)[J].光子学研究（英文）,2022(01):261-268
A类：
iHWG,nondispersive,sumer
B类：
Silicon,substrate,integrated,hollow,waveguide,miniaturized,optical,gas,sensing,Gas,sensors,have,wide,variety,applications,Among,various,existing,technologies,outstanding,advantages,development,Internet,Things,consumer,electronics,has,put,stringent,requirements,technology,Here,we,demonstrate,chip,scale,silicon,serve,channel,cell,It,fabricated,through,wafer,etching,bonding,further,assembled,off,light,source,detector,build,fully,functional,infrared,NDIR,C02,size,dimension,excluding,microcontroller,board,This,solution,compactness,versatility,robustness,cost,provides,effective,platform,ranging,from,air,quality,monitoring
AB值：
0.547123
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