典型文献
A reconstruction method of AFM tip by using 2 pm lattice sample
文献摘要：
As an ultra-precise instrument to characterize nano-morphology and structure,the morphology of atomic force mi-croscopy(AFM)tip directly affects the quality of the scanned images,which in turn affects the measurement accuracy.In order to accurately characterize three-dimensional information of AFM tip,a reconstruction method of AFM tip us-ing 2 pm lattice sample is researched.Under normal circumstances,an array of micro-nano structures is used to recon-struct the morphology of AFM tip.Therefore,the 2 pm lattice sample was developed based on semiconductor tech-nology as a characterization tool for tip reconstruction.The experimental results show that the 2 pm lattice sample has good uniformity and consistency,and can be applied to the tip reconstruction method.In addition,the reconstruction method can accurately obtain the morphology of AFM tip,effectively eliminate the influence of the"probe effect"on the measurement results,and improve measurement accuracy.
文献关键词：
中图分类号：
作者姓名：
ZHANG Xiaodong;ZHAO Lin;HAN Zhiguo;XU Xiaoqing;LI Suoyin;WU Aihua
作者机构：
Hebei Semiconductor Research Institute,Shijiazhuang 050051,China
文献出处：
引用格式：
[1]ZHANG Xiaodong;ZHAO Lin;HAN Zhiguo;XU Xiaoqing;LI Suoyin;WU Aihua-.A reconstruction method of AFM tip by using 2 pm lattice sample)[J].光电子快报（英文版）,2022(07):440-443
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B类：
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AB值：
0.473052
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