典型文献
White light interferometry with spectral-temporal demodulation for large-range thickness measurement
文献摘要：
Film thickness measurement can be realized using white light interferometry, but it is challenging to guarantee high precision in a large range of thicknesses. Based on scanning white light interferometry, we propose a spectral-temporal demodulation scheme for large-range thickness measurement. The demodulation process remains unchanged for either coatings or substrate-free films, while some adjustments are made according to the estimated optical thickness. Experiments show that the single-point repeatabilities for 500 nm SiO2 coating and 68 μm substrate-free Si film are no more than 0.70 nm and 1.22 nm, respectively. This method can be further developed for simultaneous measurement of surface profile and film thickness.
文献关键词：
中图分类号：
作者姓名：
Yunlong Zhu;Zhuoran Li;Xu Lu;Yonggui Yuan;Jun Yang
作者机构：
Key Laboratory of In-fiber Integrated Optics, Ministry of Education of China, Harbin Engineering University, Harbin 150001, China;College of Physics and Optoelectronic Engineering, Harbin Engineering University, Harbin 150001, China;Guangdong Provincial Key Laboratory of Information Photonics Technology (Guangdong University of Technology), Guangzhou 510006, China;School of Information Engineering, Guangdong University of Technology, Guangzhou 510008, China
文献出处：
引用格式：
[1]Yunlong Zhu;Zhuoran Li;Xu Lu;Yonggui Yuan;Jun Yang-.White light interferometry with spectral-temporal demodulation for large-range thickness measurement)[J].中国光学快报（英文版）,2022(09):091201
A类：
repeatabilities
B类：
White,light,interferometry,spectral,temporal,demodulation,large,range,measurement,Film,be,realized,using,white,but,challenging,guarantee,high,precision,thicknesses,Based,scanning,we,propose,scheme,process,remains,unchanged,either,coatings,substrate,free,films,while,some,adjustments,are,made,according,estimated,optical,Experiments,show,that,single,point,SiO2,no,more,than,respectively,This,method,further,developed,simultaneous,surface,profile
AB值：
0.554442
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