典型文献
Influence of architecture and temperature of alkali atom vapor cells on absorption spectra
文献摘要:
Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes.A self-built absorption spectrum testing system is used to test the absorption spectra of the ru-bidium atoms in alkali atom vapor cells.The influence of silicon cavity size,filling amount of rubidium atoms and temperature on the absorption spectra of rubidium atom vapor in the atom vapor cells are studied in depth through a theoretical analysis.This study provides a reference for the design and preparation of high quality chip-sized atom vapor cells.
文献关键词:
中图分类号:
作者姓名:
Yali Liu;Wei Li;Yudong Li;Xiaokuan Li;Liangsen Feng;Xinliang Li
作者机构:
Science and Technology on Metrology and Calibration Laboratory,Changcheng Institute of Metrology&Measurement,Aviation Industry Corporation of China,Beijing 100095,China
文献出处:
引用格式:
[1]Yali Liu;Wei Li;Yudong Li;Xiaokuan Li;Liangsen Feng;Xinliang Li-.Influence of architecture and temperature of alkali atom vapor cells on absorption spectra)[J].半导体学报(英文版),2022(12):95-101
A类:
hermeticity,bidium
B类:
Influence,architecture,temperature,alkali,vapor,cells,absorption,spectra,Chip,sized,high,are,successfully,fabricated,through,deep,silicon,etching,two,anodic,bonding,processes,self,built,spectrum,testing,system,used,atoms,influence,cavity,filling,amount,rubidium,studied,depth,theoretical,analysis,This,study,provides,reference,design,preparation,quality,chip
AB值:
0.470992
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