典型文献
Review in situ transmission electron microscope with machine learning
文献摘要：
Advanced electronic materials are the fundamental building blocks of integrated circuits(ICs).The microscale proper-ties of electronic materials(e.g.,crystal structures,defects,and chemical properties)can have a considerable impact on the per-formance of ICs.Comprehensive characterization and analysis of the material in real time with high-spatial resolution are indis-pensable.In situ transmission electron microscope(TEM)with atomic resolution and external field can be applied as a physical simulation platform to study the evolution of electronic material in working conditions.The high-speed camera of the in situ TEM generates a high frame rate video,resulting in a large dataset that is beyond the data processing ability of researchers us-ing the traditional method.To overcome this challenge,many works on automated TEM analysis by using machine-learning al-gorithm have been proposed.In this review,we introduce the technical evolution of TEM data acquisition,including analysis,and we summarize the application of machine learning to TEM data analysis in the aspects of morphology,defect,structure,and spectra.Some of the challenges of automated TEM analysis are given in the conclusion.
文献关键词：
中图分类号：
作者姓名：
Zhiheng Cheng;Chaolun Wang;Xing Wu;Junhao Chu
作者机构：
In Situ Devices Center,Shanghai Key Laboratory of Multidimensional Information Processing,East China Normal University,Shanghai 200241,China
文献出处：
引用格式：
[1]Zhiheng Cheng;Chaolun Wang;Xing Wu;Junhao Chu-.Review in situ transmission electron microscope with machine learning)[J].半导体学报（英文版）,2022(08):11-24
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Review,situ,transmission,microscope,machine,learning,Advanced,electronic,materials,are,fundamental,building,blocks,integrated,circuits,ICs,microscale,crystal,structures,defects,chemical,properties,can,have,considerable,impact,formance,Comprehensive,characterization,analysis,real,high,spatial,resolution,indis,pensable,In,TEM,atomic,external,field,applied,physical,simulation,platform,study,evolution,working,conditions,speed,camera,generates,frame,video,resulting,large,dataset,that,beyond,processing,ability,researchers,traditional,method,To,overcome,this,many,works,automated,by,using,gorithm,been,proposed,review,we,introduce,technical,acquisition,including,summarize,application,aspects,morphology,spectra,Some,challenges,given,conclusion
AB值：
0.572528
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