典型文献
Sn content gradient GeSn with strain controlled for high performance GeSn mid-infrared photodetectors
文献摘要：
GeSn detectors have attracted a lot of attention for mid-infrared Si photonics,due to their compatibility with Si complementary metal oxide semiconductor technology.The GeSn bandgap can be affected by Sn composition and strain,which determines the working wavelength range of detectors.Applying the Sn content gradient GeSn layer structure,the strain of GeSn can be controlled from fully strained to completely relaxed.In this work,the strain evolution of GeSn alloys was investigated,and the effectiveness of gradually increasing Sn composition for the growth of high-Sn-content GeSn alloys was revealed.Relaxed GeSn thick films with Sn composition up to 16.3％were grown,and GeSn photodetectors were fabricated.At 77 K,the photodetectors showed a cutoff wavelength up to 4.2 μm and a peak responsivity of 0.35 A/W under 1 V at 2.53 μm.These results indicate that GeSn alloys grown on a Sn content gradient GeSn structure have promising application in mid-infrared detection.
文献关键词：
中图分类号：
作者姓名：
XIANGQUAN LIU;JUN ZHENG;CHAOQUN NIU;TAORAN LIU;QINXING HUANG;MINGMING LI;DIANDIAN ZHANG;YAQING PANG;ZHI LIU;YUHUA ZUO;BUWEN CHENG
作者机构：
State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Enoineering,University of Chinese Academy of Sciences,Beijing 100049,China
文献出处：
引用格式：
[1]XIANGQUAN LIU;JUN ZHENG;CHAOQUN NIU;TAORAN LIU;QINXING HUANG;MINGMING LI;DIANDIAN ZHANG;YAQING PANG;ZHI LIU;YUHUA ZUO;BUWEN CHENG-.Sn content gradient GeSn with strain controlled for high performance GeSn mid-infrared photodetectors)[J].光子学研究（英文）,2022(07):1567-1574
A类：
GeSn,Relaxed
B类：
content,gradient,controlled,high,performance,mid,infrared,photodetectors,have,attracted,lot,attention,Si,photonics,due,their,compatibility,complementary,metal,oxide,semiconductor,technology,bandgap,can,be,affected,by,composition,which,determines,working,wavelength,range,Applying,layer,structure,from,fully,strained,completely,relaxed,In,this,evolution,alloys,was,investigated,effectiveness,gradually,increasing,growth,revealed,thick,films,up,were,grown,fabricated,At,showed,cutoff,peak,responsivity,under,These,results,indicate,that,promising,application,detection
AB值：
0.460228
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