典型文献
Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)
文献摘要：
Ultrashort laser pulses confine material processing to the laser-irradiated area by suppressing heat diffusion,resulting in precise ablation in diverse materials.However,challenges occur when high speed material removal and higher ablation efficiencies are required.Ultrafast burst mode laser ablation has been proposed as a successful method to overcome these limitations.Following this approach,we studied the influence of combining GHz bursts in MHz bursts,known as BiBurst mode,on ablation efficiency of silicon.BiBurst mode used in this study consists of multiple bursts happening at a repetition rate of 64 MHz,each of which contains multiple pulses with a repetition rate of 5 GHz.The obtained results show differences between BiBurst mode and conventional single pulse mode laser ablation,with a remarkable increase in ablation efficiency for the BiBurst mode,which under optimal conditions can ablate a volume 4.5 times larger than the single pulse mode ablation while delivering the same total energy in the process.
文献关键词：
中图分类号：
作者姓名：
Francesc Caballero-Lucas;Kotaro Obata;Koji Sugioka
作者机构：
RIKEN Center for Advanced Photonics,2-1 Hirosawa,Wako-shi,Saitama 351-0198,Japan
文献出处：
引用格式：
[1]Francesc Caballero-Lucas;Kotaro Obata;Koji Sugioka-.Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst))[J].极端制造（英文）,2022(01):74-83
A类：
microprocessing,BiBurst
B类：
Enhanced,ablation,efficiency,silicon,by,femtosecond,laser,GHz,bursts,MHz,Ultrashort,pulses,confine,irradiated,area,suppressing,heat,diffusion,resulting,precise,diverse,materials,However,challenges,occur,when,speed,removal,higher,efficiencies,required,Ultrafast,mode,has,been,proposed,successful,method,overcome,these,limitations,Following,this,approach,studied,influence,combining,known,used,study,consists,multiple,happening,repetition,rate,each,which,contains,obtained,results,show,differences,between,conventional,single,remarkable,increase,under,optimal,conditions,can,ablate,volume,times,larger,than,while,delivering,same,total,energy
AB值：
0.517077
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