典型文献
Fabrication of Ordered Micro/Nanostructures Using Probe?Based Force?Controlled Micromachining System
文献摘要：
This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nano- structures. Both the experimental and finite element simulation approaches are employed to investigate the influ- ence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/ nanostructures. The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent indentations. For the one array indentations, nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable, and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array indentation. In addition, for the indentation arrays, the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1 μm. Finally, Raman tests are also carried out based on the obtained ordered micro/nanostruc-tures with Rhodamine probe molecule. The indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate, which has the potential applications in the fields of biological or chemical molecular detection.
文献关键词：
中图分类号：
作者姓名：
Yanquan Geng;Yuzhang Wang;Jianxiong Cai;Jingran Zhang;Yongda Yan
作者机构：
Key Laboratory of Micro?systems and Micro?structures Manufacturing of Ministry of Education,Harbin Institute of Technology,Harbin 150001, China;Center for Precision Engineering,Harbin Institute of Technology, Harbin 150001,China;College of Mechanical and Electric Engineering, Changchun University of Science and Technology,Changchun 130000,China
文献出处：
引用格式：
[1]Yanquan Geng;Yuzhang Wang;Jianxiong Cai;Jingran Zhang;Yongda Yan-.Fabrication of Ordered Micro/Nanostructures Using Probe?Based Force?Controlled Micromachining System)[J].中国机械工程学报,2022(06):87-102
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B类：
Fabrication,Ordered,Nanostructures,Using,Probe,Based,Force,Controlled,Micromachining,System,This,paper,presents,probe,force,controlled,nanoindentation,method,fabricate,ordered,micro,Both,experimental,finite,element,simulation,approaches,are,employed,investigate,influ,interval,between,adjacent,indentations,rotation,angle,formed,nanostructures,contacting,part,indenter,sample,material,height,pile,up,two,competing,factors,determine,depth,relationship,one,good,consistency,periodicity,can,after,becoming,stable,variation,results,large,difference,morphology,bottom,In,addition,arrays,shape,generated,spacing,greater,than,Finally,Raman,tests,also,carried,out,obtained,Rhodamine,molecule,smaller,lead,better,enhancement,effect,substrate,which,has,potential,applications,fields,biological,chemical,molecular,detection
AB值：
0.544038
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