典型文献
Bio-inspired Flexible Airflow Sensor with Self-bended 3D Hair-like Configurations
文献摘要：
This paper presents a novel flexible airflow sensor based on four curved microcantilevers arranged in a cross-form configura-tion.A self-bending method based on MEMS technology has been used to fabricate the curved microcantilevers structure,and this method can transfer a 2D plane structure into a 3D structure with good consistency in the morphology.The curved microcantilever consists of a polyimide(PI)top layer,silicon(Si)bottom layer,and platinum(Pt)piezoresistor at the root of the cantilever.The difference in the in-plane residual stress between the PI and Si layers bent the microcantilever upward.The curved-up microcantilever transfers the fluidic momentum that acts on it to drag force,which deflects the curved-up microcantilever and changes the resistance of the piezoresistor.To realize temperature compensation and decrease the noise,a reference resistor and an ambient temperature detector were integrated for the Wheatstone half-bridge measurement and temperature monitoring,respectively.The cross-form configuration of the curved-up cantilevers has high sensitivity advan-tages and possesses direction-sensing ability.Experimental results show that the sensitivity of the sensors increased as a function of the airflow velocity,and the sensors exhibited a maximum resolution of 4 mm·s-1 and a maximum sensitivity of 60.35 mV·(ms-1)-1 when the airflow velocity was larger than 38.5 m·s-1.
文献关键词：
中图分类号：
作者姓名：
Dawei Shen;Yonggang Jiang;Zhiqiang Ma;Peng Zhao;Zheng Gong;Zihao Dong;Deyuan Zhang
作者机构：
School of Mechanical Engineering and Automation,Beihang University,Beijing 100191,China;International Research Institute of Multidisciplinary Science,Beihang University,Beijing 100191,China
文献出处：
引用格式：
[1]Dawei Shen;Yonggang Jiang;Zhiqiang Ma;Peng Zhao;Zheng Gong;Zihao Dong;Deyuan Zhang-.Bio-inspired Flexible Airflow Sensor with Self-bended 3D Hair-like Configurations)[J].仿生工程学报（英文版）,2022(01):73-82
A类：
bended,microcantilevers,microcantilever,piezoresistor,deflects,Wheatstone,cantilevers
B类：
Bio,inspired,Flexible,Airflow,Sensor,Self,Hair,like,Configurations,This,paper,presents,novel,flexible,airflow,four,curved,arranged,cross,form,self,bending,method,MEMS,technology,has,been,used,fabricate,structure,this,2D,plane,into,good,consistency,morphology,consists,polyimide,top,silicon,Si,bottom,platinum,Pt,root,difference,residual,stress,between,layers,bent,upward,transfers,fluidic,momentum,that,acts,drag,force,which,changes,resistance,To,realize,temperature,compensation,decrease,noise,reference,ambient,detector,were,integrated,half,bridge,measurement,monitoring,respectively,configuration,high,sensitivity,advan,tages,possesses,direction,sensing,ability,Experimental,results,show,sensors,increased,function,velocity,exhibited,maximum,resolution,mV,ms,when,was,larger,than
AB值：
0.534031
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