典型文献
Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber
文献摘要：
The characteristics of an innovative configuration of multiple radiofrequency (RF) coils immersed in a large metallic chamber are presented.Water-cooled copper coils were mounted within the slits of double-walled glass tubes,which were immersed into a stainless-steel chamber.The coils were connected in parallel to a gamma-type matching network,powered by an RF generator operating at industrial frequency.Adjustable leads enabled optimisation of the line impedances and thus uniformly distributed RF power across the four coils.Transitions from E-to H-mode and vice versa were measured for all coils at various oxygen pressures between 5 and 25 Pa.A uniform plasma was sustained in H-mode at the absorbed power threshold,which increased monotonously with increasing pressure in the metallic chamber.All coils exhibit the same E-to H-mode transition hysteresis and need the same amount of power for transitioning from E-to H-mode.The setup enables maintaining uniform plasma in virtually any number of coils at high power without the risk of arcing and without the dead volume typical for a classical configuration with coils mounted outside the metallic chamber.
文献关键词：
中图分类号：
作者姓名：
Dane LOJEN;Rok ZAPLOTNIK;Miran MOZETI(C);Alenka VESEL;Gregor PRIMC
作者机构：
Department of Surface Engineering,Jozef Stefan Institute,Jamova cesta 39,1000 Ljubljana,Slovenia;Jozef Stefan International Postgraduate School,Jamova cesta 39,1000 Ljubljana,Slovenia;Plasmadis Ltd.,Teslova ulica 30,1000 Ljubljana,Slovenia
文献出处：
引用格式：
[1]Dane LOJEN;Rok ZAPLOTNIK;Miran MOZETI(C);Alenka VESEL;Gregor PRIMC-.Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber)[J].等离子体科学和技术（英文版）,2022(01):70-76
A类：
impedances,arcing
B类：
Power,characteristics,multiple,inductively,coupled,RF,discharges,inside,metallic,chamber,innovative,configuration,radiofrequency,coils,immersed,large,are,presented,Water,cooled,copper,mounted,within,slits,double,walled,glass,tubes,which,into,stainless,steel,connected,parallel,gamma,type,matching,network,powered,by,generator,operating,industrial,Adjustable,leads,enabled,optimisation,line,thus,uniformly,distributed,across,four,Transitions,from,mode,vice,versa,measured,various,oxygen,pressures,between,Pa,plasma,was,sustained,absorbed,threshold,increased,monotonously,increasing,All,exhibit,same,hysteresis,need,amount,transitioning,setup,enables,maintaining,virtually,any,number,high,without,risk,dead,volume,typical,classical,outside
AB值：
0.578502
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