典型文献
High-performance millimeter-scale silicon grating emitters for beam steering applications
文献摘要:
A 2-mm-long silicon-on-insulator grating emitter with a narrow angular full width at half-maximum[FWHM]and a high sideband suppression ratio[SSR]is proposed and designed.It consists of a Si3N4/Si grating with an approximate Gaussian emission profile along the grating length,which aims to reduce the sidelobe intensity of the scanning light in the far-field,thereby improving the resolution of the longitudinal steering resolution of the light detection and ranging[lidar].Numerical analysis shows that the angular FWHM of the emitted beam could be as low as 0.026° for a grating length of 2.247 mm and the input TE-like waveguide mode at 1550 nm,and the SSR could be more than 32.622 dB.Moreover,this Si3N4/Si grating exhibits a favorable fabrication error tolerance when considering the width and length variation of the Si3N4 overlayer in practice.Our design offers a promising platform for realizing integrated optical phased arrays for the long-distance solid-state lidar.
文献关键词:
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作者姓名:
Ze Chen;Haibin Lü;Yanfeng Chen;Xiaoping Liu
作者机构:
National Laboratory of Solid State Microstructures and College of Engineering and Applied Sciences,Nanjing University,Nanjing 210093,China;Collaborative Innovation Center of Advanced Microstructures,Nanjing University,Nanjing 210093,China;School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China
文献出处:
引用格式:
[1]Ze Chen;Haibin Lü;Yanfeng Chen;Xiaoping Liu-.High-performance millimeter-scale silicon grating emitters for beam steering applications)[J].中国光学快报(英文版),2022(12):25-31
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AB值:
0.632001
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