典型文献
Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE
文献摘要：
Lithium niobate[LN]metasurfaces have emerged as a new platform for manipulating electromagnetic waves.Here,we report a fabrication technique for LN nano-grating metasurfaces by combining focused ion beam[FIB]milling with induc-tively coupled plasma reactive ion etching[ICP-RIE].Steep sidewalls with angles larger than 80° are achieved.Sharp quasi-bound states in the continuum are observed from our metasurfaces.The measured transmission spectra show good agreement with the numerical simulations,confirming the high quality of the fabricated metasurfaces.Our technique can be applied to fabricate the LN metasurfaces with sharp resonances for various applications in optical communications,on-chip photonics,laser physics,sensing,and so on.
文献关键词：
中图分类号：
作者姓名：
Chunyan Jin;Wei Wu;Lei Cao;Bofeng Gao;Jiaxin Chen;Wei Cai;Mengxin Ren;Jingjun Xu
作者机构：
Key Laboratory of Weak-Light Nonlinear Photonics,Ministry of Education,School of Physics and TEDA Applied Physics Institute,Nankai University,Tianjin 300071,China;Science and Technology on Electro-Optical Information Security Control Laboratory,Tianjin 300308,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China
文献出处：
引用格式：
[1]Chunyan Jin;Wei Wu;Lei Cao;Bofeng Gao;Jiaxin Chen;Wei Cai;Mengxin Ren;Jingjun Xu-.Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE)[J].中国光学快报（英文版）,2022(11):95-99
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AB值：
0.7133
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