典型文献
LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing
文献摘要：
Lithium niobate[LiNbO3,LN]channel and ridge waveguides have been successfully fabricated by He ion implantation,which has energy of 500 keV and fluence of 1.5×1016 ions/cm2 and is combined with lithography and the precise diamond dicing technique.The refractive index profile of the annealed LN planar waveguide was reconstructed.The propagation loss of the channel waveguide with a width of 10 μm and that of the ridge waveguides with widths of 25 μm and 15 μm were inves-tigated by the end-face coupling method.In our work,the factors that affect the waveguide properties of channel and ridge waveguides were revealed.
文献关键词：
中图分类号：
作者姓名：
Sumei Wang;Jinhua Zhao;Jinjun Gu;Mingyang Bu;Li Fan;Shuang Li;Xifeng Qin;Yicun Yao;Yingying Ren;Lei Wang
作者机构：
School of Science,Shandong Jianzhu University,Jinan 250101,China;Shandong Key Laboratory of Optical Communication Science and Technology,School of Physical Science and Information Technology,Liaocheng University,Liaocheng 252059,China;Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device,School of Physics and Electronics,Shandong Normal University,Jinan 250014,China;School of Physics,Shandong University,Jinan 250100,China
文献出处：
引用格式：
[1]Sumei Wang;Jinhua Zhao;Jinjun Gu;Mingyang Bu;Li Fan;Shuang Li;Xifeng Qin;Yicun Yao;Yingying Ren;Lei Wang-.LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing)[J].中国光学快报（英文版）,2022(07):13-17
A类：
B类：
LiNbO3,channel,ridge,waveguides,helium,implantation,combined,lithography,precise,diamond,dicing,Lithium,niobate,LN,have,been,successfully,fabricated,by,He,which,has,energy,keV,fluence,ions,technique,refractive,profile,annealed,planar,was,reconstructed,propagation,loss,that,widths,were,inves,tigated,end,face,coupling,method,In,our,work,factors,affect,properties,revealed
AB值：
0.537551
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