典型文献
On-chip short-wave infrared multispectral detector based on integrated Fabry-Perot microcavities array
文献摘要：
We demonstrate an ultra-compact short-wave infrared[SWIR]multispectral detector chip by monolithically integrating the narrowband Fabry-Perot microcavities array with the InGaAs detector focal plane array.A 16-channel SWIR multispectral detector has been fabricated for demonstration.Sixteen different narrowband response spectra are acquired on a 64×64 pixels detector chip by four times combinatorial etching processes.The peak of the response spectra varies from 1450 to 1666 nm with full width at half-maximum of 24 nm on average.The size of the SWIR multispectral detection system is remarkably reduced to a 2 mm2 detector chip.
文献关键词：
中图分类号：
作者姓名：
Zhiyi Xuan;Qingquan Liu;Zhuangzhuang Cui;Songlei Huang;Bo Yang;Chenlu Li;Shaowei Wang;Wei Lu
作者机构：
State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China;School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China;Shanghai Research Center for Quantum Sciences,Shanghai 201315,China;State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Nantong Academy of Intelligent Sensing,Nantong 226000,China
文献出处：
引用格式：
[1]Zhiyi Xuan;Qingquan Liu;Zhuangzhuang Cui;Songlei Huang;Bo Yang;Chenlu Li;Shaowei Wang;Wei Lu-.On-chip short-wave infrared multispectral detector based on integrated Fabry-Perot microcavities array)[J].中国光学快报（英文版）,2022(06):25-29
A类：
B类：
On,chip,short,wave,infrared,multispectral,detector,integrated,Fabry,Perot,microcavities,array,We,demonstrate,ultra,compact,SWIR,by,monolithically,integrating,narrowband,InGaAs,focal,plane,channel,has,been,fabricated,demonstration,Sixteen,different,response,acquired,pixels,four,times,combinatorial,etching,processes,peak,varies,from,full,width,half,maximum,average,size,detection,system,remarkably,reduced,mm2
AB值：
0.557433
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