A transition edge sensor(TES)is extremely sensitive to changes in temperature,and combined with a high-Z metal of a certain thickness,it can realize high-energy resolution measurements of particles such as X-rays.X-rays with energies below 10 keV have a weak penetrating ability,hence,only gold or bismuth of a few micrometers in thickness can guarantee a quantum effi-ciency higher than 70％.Therefore,the entire structure of the TES X-ray detector in this energy range can be realized using a microfabrication process.However,for X-rays or γ-rays from 10 keV to 200 keV,submillimeter absorber layers are required,which cannot be realized using the microfabrication process.This paper first briefly introduces a set of TES X-ray detectors and their auxiliary systems,and then focuses on the introduction of the TES γ-ray detector with an absorber based on a submillimeter lead-tin alloy sphere.The detector achieved a quantum efficiency above 70％near 100 keV and an energy resolution of approximately 161.5 eV at 59.5 keV.

Center for Transformative Science,ShanghaiTech University,Shanghai 201210,China;Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;STAR Cryoelectronics,25-A Bisbee Court,Santa Fe,NM 87508-1338,USA;Shanghai Laboratory for Particle Physics and Cosmology,INPAC and Department of Physics and Astronomy,Shanghai Jiao Tong University,Shanghai 200240,China;School of Physics,Beihang University,Beijing 100191,China;Division of Ionizing Radiation,National Institute of Metrology,NIM,No.18 Bei San Huan Dong Lu,Chaoyang Dist,Beijing 100029,China

[1]Shuo Zhang;Jing-Kai Xia;Tao Sun;Wen-Tao Wu;Bing-Jun Wu;Yong-Liang Wang;Robin Cantor;Ke Han;Xiao-Peng Zhou;Hao-Ran Liu;Fu-You Fan;Si-Ming Guo;Jun-Cheng Liang;De-Hong Li;Yan-Ru Song;Xu-Dong Ju;Qiang Fu;Zhi Liu-.Transition edge sensor-based detector:from X-ray to γ-ray)[J].核技术（英文版）,2022(07):31-42

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