典型文献
Relationship between the spatial position of the seed and growth mode for single-crystal diamond grown with an enclosed-type holder
文献摘要:
The relationship between the spatial position of the diamond seed and growth mode is investigated with an enclosed-type holder for single-crystal diamond growth using the microwave plasma chemical vapor deposition epitaxial method.The results demonstrate that there are three main regions by varying the spatial position of the seed.Due to the plasma concentration occurring at the seed edge,a larger depth is beneficial to transfer the plasma to the holder surface and suppress the poly crystalline diamond rim around the seed edge.However,the plasma density at the edge decreases drastically when the depth is too large,resulting in the growth of a vicinal grain plane and the reduction of surface area.By adopting an appropriate spatial location,the size of single-crystal diamond can be increased from 7 mm×7 mm×0.35 mm to 8.6 mm×8.6 mm×2.8 mm without the polycrystalline diamond rim.
文献关键词:
中图分类号:
作者姓名:
Wen-Liang Xie;Xian-Yi Lv;Qi-Liang Wang;Liu-An Li;Guang-Tian Zou
作者机构:
State Key Laboratory of Superhard Materials,Jilin University,Changchun 130012,China;Shenzhen Research Institute,Jilin University,Shenzhen 518057,China
文献出处:
引用格式:
[1]Wen-Liang Xie;Xian-Yi Lv;Qi-Liang Wang;Liu-An Li;Guang-Tian Zou-.Relationship between the spatial position of the seed and growth mode for single-crystal diamond grown with an enclosed-type holder)[J].中国物理B(英文版),2022(10):140-144
A类:
B类:
Relationship,between,spatial,seed,growth,mode,single,diamond,grown,enclosed,type,holder,relationship,is,investigated,using,microwave,plasma,chemical,vapor,deposition,epitaxial,method,results,demonstrate,that,there,three,main,regions,by,varying,Due,concentration,occurring,edge,larger,depth,beneficial,transfer,surface,suppress,rim,around,However,density,decreases,drastically,when,too,resulting,vicinal,grain,plane,reduction,area,By,adopting,appropriate,location,size,can,increased,from,without,polycrystalline
AB值:
0.485058
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