典型文献
Subsurface damage pattern and formation mechanism of monocrystalline β-Ga2O3 in grinding process
文献摘要：
Monocrystalline beta-phase gallium oxide(β-Ga2O3)is a promising ultrawide bandgap semiconductor material.However,the deformation mechanism in ultraprecision machining has not yet been revealed.The aim of this study is to investigate the damage pattern and formation mechanism of monocrystalline β-Ga2O3 in different grinding processes.Transmission electron microscopy was used to observe the subsurface damage in rough,fine,and ultrafine grinding processes.Nanocrystals and stacking faults existed in all three processes,dislocations and twins were observed in the rough and fine grinding processes,cracks were also observed in the rough grinding process,and amorphous phase were only present in the ultrafine grinding process.The subsurface damage thickness of the samples decreased with the reduction in the grit radius and the grit depth of cut.Subsurface damage models for grinding process were established on the basis of the grinding principle,revealing the mechanism of the mechanical effect of grits on the damage pattern.The formation of nanocrystals and amorphous phase was related to the grinding conditions and material characteristics.It is important to investigate the ultraprecision grinding process of monocrystalline β-Ga2O3.The results in this work are supposed to provide guidance for the damage control of monocrystalline β-Ga2O3 grinding process.
文献关键词：
中图分类号：
作者姓名：
Xin YANG;Renke KANG;Shang GAO;Zihe WU;Xianglong ZHU
作者机构：
Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116024,China
文献出处：
引用格式：
[1]Xin YANG;Renke KANG;Shang GAO;Zihe WU;Xianglong ZHU-.Subsurface damage pattern and formation mechanism of monocrystalline β-Ga2O3 in grinding process)[J].机械工程前沿,2022(02):113-123
A类：
Monocrystalline,grits
B类：
Subsurface,damage,pattern,mechanism,monocrystalline,Ga2O3,grinding,beta,phase,gallium,oxide,promising,ultrawide,bandgap,semiconductor,material,However,deformation,ultraprecision,machining,not,yet,been,revealed,aim,this,study,investigate,different,processes,Transmission,electron,microscopy,was,used,subsurface,rough,ultrafine,Nanocrystals,stacking,faults,existed,three,dislocations,twins,were,observed,cracks,also,amorphous,only,present,thickness,samples,decreased,reduction,radius,depth,cut,models,established,basis,principle,revealing,mechanical,effect,nanocrystals,related,conditions,characteristics,It,important,results,work,are,supposed,provide,guidance,control
AB值：
0.436115
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