典型文献
Ultrafast miniaturized GaN-based optoelectronic proximity sensor
文献摘要：
In this work, a novel ultrafast optoelectronic proximity sensor based on a submillimeter-sized GaN monolithic chip is presented. Fabricated through wafer-scale microfabrication processes, the on-chip units adopting identical InGaN/GaN diode structures can function as emitters and receivers. The optoelectronic properties of the on-chip units are thoroughly investigated, and the ability of the receivers to respond to changes in light intensity from the emitter is verified, revealing that the sensor is suitable for operation in reflection mode. Through a series of dynamic measurements, the sensor is highly sensitive to object movement at subcentimeter distances with high repeatability. The sensor exhibits ultrafast microsecond response, and its real-time monitoring capability is also demonstrated by applying it to detect slight motions of moving objects at different frequencies, including the human heart rate, the vibration of the rotary pump, the oscillation of the speaker diaphragm, and the speed of the rotating disk. The compact and elegant integration scheme presented herein opens a new avenue for realizing a chip-scale proximity sensing device, making it a promising candidate for widespread practical applications.
文献关键词：
中图分类号：
作者姓名：
Xiaoshuai An;Hongying Yang;Yumeng Luo;Zhiqin Chu;Kwai Hei Li
作者机构：
School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China;Department of Electrical and Electronic Engineering, The University of Hong Kong, Hong Kong, China;School of Biomedical Sciences, The University of Hong Kong, Hong Kong, China;Engineering Research Center of Integrated Circuits for Next-Generation Communications, Ministry of Education, Southern University of Science and Technology, Shenzhen 518055, China;Engineering Research Center of Three Dimensional Integration in Guangdong Province, Southern University of Science and Technology, Shenzhen 518055, China;e-mail: zqchu@eee.hku.hk;e-mail: khli@sustech.edu.cn
文献出处：
引用格式：
[1]Xiaoshuai An;Hongying Yang;Yumeng Luo;Zhiqin Chu;Kwai Hei Li-.Ultrafast miniaturized GaN-based optoelectronic proximity sensor)[J].光子学研究（英文）,2022(08):1964
A类：
subcentimeter
B类：
Ultrafast,miniaturized,optoelectronic,proximity,sensor,this,work,novel,ultrafast,submillimeter,sized,monolithic,chip,presented,Fabricated,through,wafer,scale,microfabrication,processes,units,adopting,identical,InGaN,diode,structures,function,emitters,receivers,properties,are,thoroughly,investigated,respond,changes,intensity,from,verified,revealing,that,suitable,operation,reflection,mode,Through,series,dynamic,measurements,highly,sensitive,movement,distances,repeatability,exhibits,microsecond,response,monitoring,capability,also,demonstrated,by,applying,detect,slight,motions,moving,objects,different,frequencies,including,human,heart,vibration,rotary,pump,oscillation,speaker,diaphragm,speed,rotating,disk,compact,elegant,integration,scheme,herein,opens,new,avenue,realizing,sensing,device,making,promising,candidate,widespread,practical,applications
AB值：
0.637309
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