典型文献
Nanosecond laser-induced controllable periodical surface structures on silicon
文献摘要:
In this paper,an effective method is proposed to generate specific periodical surface structures.A 532 nm linearly polarized laser is used to irradiate the silicon with pulse duration of 10 ns and repetition frequency of 10 Hz.Laser-induced periodic surface structures[LIPSSs]are observed when the fluence is 121 mJ/cm2 and the number of pulses is 1000.The threshold of fluence for generating LIPSS gradually increases with the decrease of the number of pulses.In addition,the laser incident angle has a notable effect on the period of LIPSS,which varies from 430 nm to 1578 nm,as the incident angle ranges from 10° to 60° correspondingly.Besides,the reflectivity is reduced significantly on silicon with LIPSS.
文献关键词:
中图分类号:
作者姓名:
Lei Chen;Zelin Liu;Chuan Guo;Tongcheng Yu;Minsun Chen;Zhongjie Xu;Hao Liu;Guomin Zhao;Kai Han
作者机构:
College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China;Hunan Provincial Key Laboratory of High Energy Laser Technology,Changsha 410073,China;State Key Laboratory of Pulsed Power Laser Technology,Hefei 230037,China
文献出处:
引用格式:
[1]Lei Chen;Zelin Liu;Chuan Guo;Tongcheng Yu;Minsun Chen;Zhongjie Xu;Hao Liu;Guomin Zhao;Kai Han-.Nanosecond laser-induced controllable periodical surface structures on silicon)[J].中国光学快报(英文版),2022(01):186-191
A类:
irradiate,LIPSSs
B类:
Nanosecond,laser,induced,controllable,periodical,surface,structures,silicon,In,this,paper,effective,method,proposed,generate,specific,linearly,polarized,used,duration,ns,repetition,frequency,Laser,are,observed,when,fluence,mJ,number,pulses,threshold,generating,gradually,increases,decrease,addition,incident,angle,has,notable,which,varies,from,ranges,correspondingly,Besides,reflectivity,reduced,significantly
AB值:
0.495679
相似文献
机标中图分类号,由域田数据科技根据网络公开资料自动分析生成,仅供学习研究参考。