典型文献
Bionic MEMS for Touching and Hearing Sensations:Recent Progress,Challenges,and Solutions
文献摘要：
This paper reviews the recent progress on bionic microelectromechanical systems(MEMS)used for touching and hearing sensations,focusing on the following three types of devices:MEMS tactile sensors,MEMS directional microphones,and MEMS vector hydrophones.After reviewing the electromechanical coupling principles,design,and performance of these MEMS devices,the authors conclude that it is vital for future research efforts in bionic MEMS to focus more on microfabri-cation technologies.The development of robust microfabrication flows is the basis to implement hybrid electromechanical coupling principles based on novel functional materials.High-quality polymeric micromachining technologies can also significantly enhance the potential of existing bionic MEMS designs for more practical applications.
文献关键词：
中图分类号：
作者姓名：
Chang Ge;Edmond Cretu
作者机构：
Department of Electrical and Computer Engineering,The University of British Columbia,Vancouver,BC V6T 1Z4,Canada
文献出处：
引用格式：
[1]Chang Ge;Edmond Cretu-.Bionic MEMS for Touching and Hearing Sensations:Recent Progress,Challenges,and Solutions)[J].仿生工程学报（英文版）,2022(03):590-615
A类：
Touching,Sensations,microphones,microfabri
B类：
Bionic,MEMS,Hearing,Recent,Progress,Challenges,Solutions,This,paper,reviews,recent,progress,bionic,microelectromechanical,systems,used,touching,hearing,sensations,focusing,following,three,types,devices,tactile,sensors,directional,vector,hydrophones,After,reviewing,coupling,principles,performance,these,authors,conclude,that,vital,future,research,efforts,more,technologies,development,robust,microfabrication,flows,basis,implement,hybrid,novel,functional,materials,High,quality,polymeric,micromachining,also,significantly,enhance,potential,existing,designs,practical,applications
AB值：
0.613623
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