典型文献
Synthesis and electromagnetic transport of large-area 2D WTe2 thin film
文献摘要：
Tungsten telluride thin films were successfully prepared on monocrystal sapphire substrates by using atomic layer de-position and chemical vapor deposition technology,and the effects of different tellurization temperatures on the properties of tungsten telluride films were investigated.The growth rate,crystal structure and composition of the film samples were character-ized and analyzed by using scanning electron microscope,Raman spectroscopy and X-ray photoelectron spectroscopy.The res-ults showed that tungsten telluride thin films with good crystal orientation in(001)were obtained at telluride temperature of 550℃.When the telluride temperature reached 570℃,the tungsten telluride began to decompose and unsaturated mag-netoresistance was found.
文献关键词：
中图分类号：
作者姓名：
Yumeng Zhang;Zhejia Wang;Jiaheng Feng;Shuaiqiang Ming;Furong Qu;Yang Xia;Meng He;Zhimin Hu;Jing Wanq
作者机构：
Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China;Jiaxing Microelectronics Instrument and Equipment Engineering Center of the Chinese Academy of Sciences,Jiaxing 314000,China;Jiaxing Kemin Electronic Equipment Technology Co.,Ltd.,Jiaxing 314000,China;Institute of Physics of the Chinese Academy of Sciences,Beijing1 00190,China
文献出处：
引用格式：
[1]Yumeng Zhang;Zhejia Wang;Jiaheng Feng;Shuaiqiang Ming;Furong Qu;Yang Xia;Meng He;Zhimin Hu;Jing Wanq-.Synthesis and electromagnetic transport of large-area 2D WTe2 thin film)[J].半导体学报（英文版）,2022(10):49-54
A类：
monocrystal,tellurization,netoresistance
B类：
Synthesis,electromagnetic,transport,large,area,2D,WTe2,thin,Tungsten,telluride,films,were,successfully,prepared,sapphire,substrates,by,using,atomic,layer,chemical,vapor,deposition,technology,effects,different,temperatures,properties,tungsten,investigated,growth,structure,composition,samples,character,ized,analyzed,scanning,microscope,Raman,spectroscopy,ray,photoelectron,ults,showed,that,good,orientation,obtained,When,reached,began,decompose,unsaturated,was,found
AB值：
0.535524
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